The Efficiency Study of Using Different Extinguishers On Trichlorosilane Fires

With the rapid development of technology, a variety of chemicals have proliferated all over the industries. The unique properties of certain chemicals are not only could improve the product yield rate and productivity. On the other hand, the chemical could bring about the devastating consequence to the complicated, complex, and destructive chemical-related accidents.

This study was on TCS ( Trichlorosilane, SiHCl₃ ) in semiconductor and solar energy industries as the principal resource for the ultrapure silicon. Due to its dangerous properties, TCS had caused numerous arduous fires, such as TCS truck overturned in Chengdu, Sichuan province on Jun 2011, solar energy plant leaked in Pingtung, Taiwan on Jan 2011. Many concerns aroused among the relevant agencies. 

TCS ignited or reated with air will generate chlorine and hydrochloric acid vapors; and further, it will produce hydrochloric acid vapors on contacting with water. Therefore, those hazardous, corrosive gases may cause severe respiratory tract and health injury. The study is to investigate the effectiveness of the different fire extinguisher agents (dry powder, CO₂, Halon, and etc) that were available on the market to apply on fires involving small amount of TCS leakage. Tested on the 3kg of TCS spill fire, experiments were to extinguish the small fire by dry Powder, CO₂ and Halon and to observe their efficiencies. Experiments showed that none of dry Powder and CO₂ agents would put out fires. Halon, applying on TCS fire, also failed.

Further experiments should be tested on extinguishing the TCS in order to verify the suggestions by  various guides or manuals. And more researches on the appropriate extinguishing method should base on the TCS burning characteristics in order to establish an effective emergency measures.

Keywords: Trichlorosilane (TCS), water-reactive, extinguishers