Wen Dar Liu

Citation name

Liu, W. D.

Affiliation

Versum Materials Inc. (Air Products' Electronic Materials Division Spin-off Company)

Country

Taiwan

Authored

(428b) Atomic-Level Insights into Chemical Additives Used for Silicon-Containing Film Removal during Integrated Circuit Manufacturing

Andrew J. Adamczyk

2017 Annual Meeting (ISBN: 978-0-8169-1102-8)

Associated proceedings

2017 Annual Meeting