UltiKleen Excellar ER Filter | AIChE

UltiKleen Excellar ER Filter

As the semiconductor industry moves to narrower linewidths, the demand heightens for filtration products that capture smaller fluid contaminants in the nanometer range. Among the nine new products launched by this filter maker are two that target single-wafer and batch-mode wet-chemical processing. The UltiKleen Excellar ER Filter is a 20-nm-rated, polytetrafluoroethylene (PTFE) membrane that offers superior non-dewetting in aqueous and high-viscosity chemical applications. The Ultipleat SP DR Filter, a 30-nm-rated unit designed for wet-chemical surface preparation, features an asymmetric design that allows for dual retention, and its polymer material enables the filter to operate at higher temperatures than other polymers. The filter also boasts improved chemical resistance, a hydrophilic surface, and high flowrates.

Company 

Pall Corp.

Teaser 

Membranes Cater to Chipmakers’ Nanometer Requirements

Product Category