Plasma Module

By combining modeling capabilities related to fluid mechanics, reaction engineering, physical kinetics, heat transfer, mass transfer and electro-magnetics, the Plasma Module lets users model low-temperature, non-equilibrium plasma discharges in a range of engineering disciplines, including light sources, semiconductor processes, surface coating, and medical sterilization applications. Modeling the interaction between the plasma and an external electrical circuit is an important part of understanding the electrical characteristics of the discharge. This new tool lets users model and evaluate the complex interaction between the electromagnetic fields and charged particles that collectively constitute the plasma. There are specialized, customizable modeling interfaces for the most common types of plasma reactors, including inductively coupled plasmas (ICP), DC discharges, wave-heated discharges (microwave plasmas), and capacitatively coupled plasmas (CCP). Improved simulation capabilities can help to reduce costly experiments and increase productivity.