Cleanroom Robots | AIChE

Cleanroom Robots

Designed for semiconductor manufacturing, testing and handling applications, the new 6-axis robot family includes the KUKA KR 3 CR tabletop robot with a 3-kg payload and a 635-mm reach and the KUKA KR 16 CR robot with a 16-kg payload and a 1,600-mm reach. Each model meets the appropriate ISO and DIN standards for cleanroom operation and is class 5 according to DIN EN ISO 14644-1 and class 100 according to U.S. Federal Standard 209 E. The robots can be integrated with Siemens Simatic Equipment Control System.

Company 

KUKA Robotics Corp

Teaser 

Cleanroom Robots Handle Semiconductor Applications

Source 

Product Category