(217fo) Simulation Study On the Preparation and Application of High-Purity Monosilane

Simulation study on the preparation and application of high-purity monosilane

Guoqiang Huang^1,2, Hongxing Wang², Jinyi Chen², Guoliang Su¹, Huyong Zhao¹

1 School of Chemical Engineering, Tianjin University, Tianjin, 300072, China

2 PEIYANG CHEMICAL EQUIPMENT CO., LTD, Tianjin, China, 300072, China

Abstract

The production of monosilane was proposed via different technical route. One process was single column reactive distillation process by trichlorosilane anti-disproportionation. The flowsheet simulation model of the process on RadFrac distillation model blocks of the Aspen Plus platform was built up and the accurate analysis were accomplished. The reaction kinetics and chemical equilibrium were taken into account in the equilibrium stage model. The results demonstrated that the monosilane of 99.9% purity could be accomplished by this process. A pumparound block was applied to reduce the condenser duty. The effects of operating pressure, feed stage location, liquid holdup per stage and pumparound location were also investigated in this research. However, the coolant temperature was too low, which restricted the application of single column process. Therefore, a double columns process was developed to increase condenser temperature. The simulation results showed that the double columns process could provide suitable condenser temperature. Another process was reactive distillation coupled with absorption process in order to improve condenser temperature. Operating parameters were determined by different distillate rate and reflux ratio. The results showed that the yield of monosilane approached 100% and condenser temperature was -17 °C. The effects of absorbent rate, feed stage of circulating stream and liquid holdup on production yield and condenser temperature were also investigated. The economic evaluation of single column process, double columns process and absorption process were proposed based on the previous research. The evaluation results demonstrated that the absorption process was feasible in industry due to higher condenser temperature, lower equipment operation and maintenance cost.

Keywords: Chemical Reactions; Distillation; Absorption; Monosilane; Trichlorosilane anti-disproportionation