Micro and Nanofabricated Sensors

Li, D., University of Wyoming

This session will focus on micro and nanosensors, with specific emphasis on the fabrication approaches and unique applications. Silicon-based MEMS fabrication technology and its potential and limitations for microsensor development will be addressed in this session. The incorporation of sensors into arrays and other forms of integration within micro and nanosystems are also of interest. Advances in non-planar, non-silicon based fabrication strategies, including nanotube and nanoelectrode configurations as microsensors or microdetection systems are also invited.



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