(235c) The Role of Time-Scale Analysis in Simulation of ALD and CVD Surface Reaction Kinetics | AIChE

(235c) The Role of Time-Scale Analysis in Simulation of ALD and CVD Surface Reaction Kinetics

Authors 

Adomaitis, R. A. - Presenter, University of Maryland
Remmers, E., University of Maryland
Travis, C. D., University of Maryland
Arana-Chavez, D., University of Maryland

Topics 

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