(741e) A Simple Method to Characterize MEMS Surfaces Textured with Gold Nanoparticles Deposited Using a Gas-Expanded Liquid Technique

Commercialization of a spectrum of useful Micro-electromechanical systems (MEMS) is still hindered by surface phenomena that dominate at the micron scale. A useful strategy devised recently to address the tribological issues that limit the yield and reliability of MEMS involves texturing of MEMS surfaces using nanoparticles. Indeed, MEMS surfaces textured by depositing gold nanoparticles using a gas-expanded liquid technique are reported to exhibit significantly reduced adhesion. However, characterization of such textured MEMS surfaces still remains a challenge. A technique to determine the surface coverage of deposited gold nanoparticles is needed, so that the effect of gold nanoparticle based surface texturing on the tribology of MEMS surfaces can be studied systematically. We report on a simple technique based on optically determined resonance that can be used to determine the surface coverage of a gold nanoparticle coating deposited on MEMS surfaces to texture them.