2025 Spring Meeting and 21st Global Congress on Process Safety April 6-10, 2025 Hilton Anatole, Dallas, TX
2025 AIChE Annual Meeting November 2-6, 2025 John B. Hynes Veterans Memorial Convention Center, Marriott Copley Place, Sheraton Back Bay | Boston, MA
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Julius Suherman Citation name Suherman, J. Affiliation UCLA State CA Country USA Authored(632d) Multivariable Run-to-Run Control for an Atomic Layer Etching Process Using a Transformer ModelHenrik WangFeiyang OuJulius SuhermanGerassimos OrkoulasPanagiotis Christofides2024 AIChE Annual Meeting (ISBN: 978-0-8169-1122-6)(375u) Time-Series Multiscale Computational Fluid Dynamics Data Modeling with Transformers for Atomic Layer ProcessingHenrik WangFeiyang OuJulius SuhermanMatthew TomGerassimos OrkoulasPanagiotis Christofides2024 AIChE Annual Meeting (ISBN: 978-0-8169-1122-6)(458h) Online Feedback Control of an Atomic Layer Etching Process Using Model Predictive Control Based on a Transformer ModelFeiyang OuHenrik WangJulius SuhermanGerassimos OrkoulasPanagiotis Christofides2024 AIChE Annual Meeting (ISBN: 978-0-8169-1122-6) Associated proceedings 2024 AIChE Annual Meeting