Jeff Bielefeld Citation name: Bielefeld, J. Affiliation: Intel Corporation State: OR Country: USA Authored:(600e) Control of Nano-Porosity In Plasma Deposited Low-k Diffusion Barrier and Inter-Layer Dielectrics for Nano-Electronic ApplicationsSean KingEbony MaysJeff BielefeldMing LiuDavid Gidley2011 Annual Meeting Associated proceedings: 2011 Annual Meeting