Jeff Bielefeld

Citation name:

Bielefeld, J.
Affiliation:

Intel Corporation
State:

OR
Country:

USA

Authored:

(600e) Control of Nano-Porosity In Plasma Deposited Low-k Diffusion Barrier and Inter-Layer Dielectrics for Nano-Electronic Applications

2011 Annual Meeting

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2011 Annual Meeting

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Jeff Bielefeld