(199e) Synthesis and Characterization of ALD-Deposited Thin Films of Aluminum Oxides, Nickle Oxides, and Cobalt Oxides for Recetenna-Based Heat Harvesters
Aluminum oxide and nickels oxide thin films of various thickness, density, and microstructure have been produced by ALD. These films arer characterized using the following methods: Scanning Auger Microprobe (SAM), atomic force microscopuy (AFM), x-ray diffraction (XRD), scanning electron microscopy (SEM), transmission electron microscopy (TEM), and x-ray photoelectron spectroscopy (XPS). The data are correlated to help understand the interconnectedness of ALD processing parameters with deposit thickness, homogeneity, and uniformity. The goal is to optimize the properties of the deposited thin film metal-oxide.
In addition to the aluminum and nickel oxide system, this presenatation will also provide a status on our work with using ALD to form cobalt oxide thin films.
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