(747d) Preparation of Amorphous Carbon Molecular Sieve Membranes Via Plasma-Enhanced Chemical Vapor Deposition | AIChE

(747d) Preparation of Amorphous Carbon Molecular Sieve Membranes Via Plasma-Enhanced Chemical Vapor Deposition

Authors 

Nagasawa, H. - Presenter, Hiroshima University
Kanezashi, M., Hiroshima University
Yoshioka, T., Hiroshima University
Tsuru, T., Hiroshima University

Amorphous carbon membranes were fabricated on porous ceramic substrates by means of plasma-enhanced chemical vapor deposition (PECVD) using propane as the carbon precursor. The gas permeation measurement revealed that PECVD-derived amorphous carbon membranes possessed molecular sieving properties. Although the amorphous carbon layer was deposited at room temperature, the membrane showed a good thermal stability.

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