(274c) Closed Batch iCVD of Ultra-Thin and Conformal Polymer Films

Authors: 
Chen, N., MIT
Petruczok, C. D., Massachusetts Insitute of Technology
Gleason, K. K., Massachusetts Institute of Technology
Topics: 

Checkout

This paper has an Extended Abstract file available; you must purchase the conference proceedings to access it.

Checkout

Do you already own this?

Pricing


Individuals

AIChE Members $150.00
AIChE Graduate Student Members Free
AIChE Undergraduate Student Members Free
Non-Members $225.00