(250e) Fundamental Models of the Metalorganic Vapor Phase Epitaxy of Compound Semiconductors

Mountziaris, T. J., University of Massachusetts

Klavs Jensen's pioneering research has enabled and inspired the development of fundamental models of the Metalorganic Vapor Phase Epitaxy (MOVPE) of thin films of compound semiconductors. These models have evolved to become powerful tools for designing and optimizing commercial MOVPE reactors.  This presentation will focus on the historical evolution of fundamental models describing complex transport phenomena and chemical reactions underlying the MOVPE process, starting from the early years of Klavs' groundbreaking research at the University of Minnesota. The numerical solution of these models has elucidated complex flow phenomena arising in MOVPE systems and has enabled parametric studies that can predict optimal operating conditions maximizing the thickness and compositional uniformity of the deposited films.