(65e) Development of Metal Nanowires for Sensor Applications

Nanomaterials, SiC semiconductor, metal oxides and microfabrication technology is used to develop H2, CxHy, NOx, CO, O2, and CO2 sensors for some application. Silicon-based processing techniques (commonly referred to as microelectromechanical systems or MEMS technology) and their use in the fabrication of chemical sensing microsystems have enabled the fabrication of new sensor structures and sensor arrays with high capabilities but limited size, weight, and power consumption. Work has been on-going to develop an integrated smart leak detection system based on miniaturized sensors to detect hydrogen, hydrocarbons, or hydrazine, and oxygen. The approach is to implement MEMS based sensors incorporated with signal conditioning electronics, power, data storage, and telemetry enabling intelligent systems. The final sensor system will be self-contained with a surface area comparable to a postage stamp.