Combined Run-to-Run and Lqg Control of a 12-Inch Rapid Thermal Processing Equipment | AIChE

Combined Run-to-Run and Lqg Control of a 12-Inch Rapid Thermal Processing Equipment

Authors 

Lee, K. S. - Presenter, Sogang. Univ.
Won, W. - Presenter, Sogang Univ.
Yoon, W. - Presenter, Sogang Univ.
Jie, S. - Presenter, Kornic Systems Co.
Na, B. - Presenter, Kornic Systems Co.