Particles in Semiconductor Processing

Particles, and especially nanoparticles, play many roles in the processing of semiconductors for electronic and photonic applications. Unintentionally generated particles are sources of contamination and yield loss in conventional processing. Slurries for chemical mechanical polishing (CMP) contain abrasive nanoparticles of a variety of materials. Semiconductor nanoparticles or 'quantum dots' are envisioned by many as active components of future electronic and photonic devices. This session is intended to include studies of particle formation, or or the prevention thereof, and particle behavior in any or all of these roles. Both experimental and theoretical or modeling studies are welcome.