(323a) Photostimulation Of Diffusion And Activation Of Dopants In Ion Implantation Applications | AIChE
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(323a) Photostimulation Of Diffusion And Activation Of Dopants In Ion Implantation Applications

  • Conference: AIChE Annual Meeting
  • Year: 2007
  • Proceeding: 2007 Annual Meeting
  • Group: Materials Engineering and Sciences Division
  • Session:
    Transport Phenomena in Electronic Materials Processing
  • Time:
    Tuesday, November 6, 2007 - 3:30pm-3:48pm
Authors: 
Gorai, P., University of Illinois
Vaidyanathan, R., University of Illinois, Urbana - Champaign
Kwok, C., University of Illinois

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