(194b) Multivariate Batch Process Monitoring Utilizing Summary Variables with An Application to Semiconductor Etch | AIChE

(194b) Multivariate Batch Process Monitoring Utilizing Summary Variables with An Application to Semiconductor Etch

Authors 

Gallagher, N. B. - Presenter, Eigenvector Research, Inc.
Wise, B. M. - Presenter, Eigenvector Research, Inc.
Shaver, J. M. - Presenter, Eigenvector Research, Inc.
Roginski, R. T. - Presenter, Eigenvector Research, Inc.
Koch, R. S. - Presenter, Eigenvector Research, Inc.

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