Simulation and Control of Electronic Materials Manufacturing Systems
Contributions describing the development and/or application of advanced methods for modeling, optimization and control for microelectronics manufacturing processes are solicited. Theoretical areas of interest include, but are not limited to, multiscale model development, model reduction, state estimation and nonlinear controller design, real-time batch process control and optimization, novel sensors for monitoring and control, inferential sensors and control, integration of process modeling, control, and optimization.
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