Reactor Design and Analysis for Electronic Materials
Efficient reactor design is key for the optimised manufacturing of electronic materials. In this session we solicit papers describing recent advances in reactor design, optimisation, operation and control for the production of electronic materials, including (but not limited to) techniques such as CVD, etching, CMP, RTP, ALE, etc. Both experimental and computational/modelling papers will be featured. Papers focusing on novel experimental reactor and controller designs and on high-performance computing applications, including multi-scale modelling and modelling of reacting flows and surface kinetics are encouraged.
Paper abstracts are public but to access Extended Abstracts, you must first purchase the conference proceedings.
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