(605e) Synthesis and Characterization of Organic-Functionalized Pure-Silica-Zeolite Conference: AIChE Annual MeetingYear: 2005Proceeding: 2005 AIChE Annual MeetingGroup: 5th Topical Conference on Nanoscale Science and EngineeringSession: Nanostructured Organic/Inorganic Hybrid Materials: II Time: Friday, November 4, 2005 - 1:54pm-2:15pm Authors: Lew, C. M., University of California, Riverside Davis, M. E., California Institute of Technology Li, Z., University of California, Riverside Li, S., University of California, Riverside Medina, D. I., University of California, Riverside Yan, Y., University of Delaware Hwang, S., California Institute of Technology Sun, W., University of California, Riverside As the feature size of next-generation microprocessors decreases, the need for low-dielectric constant (low-k) materials with high mechanical strength is an increasing concern. Many potential porous materials take advantage of the low k value of air, which is about 1, but they are often amorphous in nature and thus lack mechanical strength. Porous zeolites, however, are highly crystalline and have a high elastic modulus while retaining the low k values of amorphous porous silica materials. Since water has a high k value, moisture adsorption is a serious concern for all porous low-k materials. Consequently, along with low k and high elastic modulus values, hydrophobicity is becoming an increasingly important parameter., To combat this problem, post-spin-on silylation treatments with chlorotrimethylsilane and hexamethyldisilazane have been performed, and pure-silica zeolite (PSZ) MFI has been functionalized with methyltrimethoxysilane. Here, we report an organic functionalized pure-silica zeolite with an MFI-type structure prepared through a direct-synthesis method by adding a fluorinated silane to the synthesis solution, and the added fluorine functionality increased the hydrophobicity of the zeolite. The zeolite was characterized by x-ray diffraction, 29Si solid-state nuclear magnetic resonance spectroscopy, nitrogen adsorption, FT infrared spectroscopy, and thermogravimetric analysis. Spin-on films from the nanoparticle suspension exhibited higher water contact angles than pure-silica zeolite MFI films, and the zeolite powders had low water content.  Li, Z.J.; Li, S.; Luo, H.M.; Yan, Y. Adv. Funct. Mater. 2004, 14, 1019-1024.  Wang, Z.B.; Mitra, A.P.; Wang, H.T.; Huang, L.M.;Yan, Y.S. Adv. Mater. 2001, 13, 1463-1466.  Li, Z.J.; Lew, C.M.; Li, S.; Medina, D.I.; Yan, Y. J. Phys. Chem. B 2005, 109, 8652-8658.  Li, S.; Li, Z.J.; Medina, D.; Lew, C.; Yan, Y. Chem. Mater. 2005, 17, 1851-1854.